EE 817

A multidisciplinary introduction to advanced lithographic microfabrication processes, specifically focusing on X-ray lithography (XRL) using synchrotron radiation and the LIGA process. Engineering and scientific aspects of the various process steps, as well as related applications are discussed, granting in-depth knowledge on XRL and LIGA. In addition, the course introduces students to various aspects of process technology and microcomponent layout relevant to academic research and industrial applications in microsystems and microelectronics.