ME 887

Fundamental concepts of Microsystems and Microelectromechanical systems (MEMS) will be discussed. Materials and fabricating technologies for MEMS are outlined; this will include various lithography-based processes, etching processes, and deposition processes. Modeling of MEMS will be discussed, including mechanics, thermal fluid, and piezoelectric systems. MEMS packaging issues will be discussed. Several case studies will be provided for better understanding of the theoretical developments.